I-Lithograph ye-Laser ye-Photonic Lithograph (i-DL) ingenye yezikhombisi-ndlela eziphambili ekuthuthukisweni kobuchwepheshe obusetshenziselwe ukudala i-polymer micro- kanye nanoobjects. Inhlanganisela yayo engenamikhawulo yikhono lokwenza izakhiwo cishe kunoma yikuphi ukucushwa kwezici ezintathu, ezingasetshenziswa lapho kudala amakristalu e-Photon, ama-wavegcuides, amadivaysi ahlukahlukene okusebenza.
Kodwa-ke, naphezu kwamathuba amahle anikezwe yibu buchwepheshe, iqukethe ukulinganiselwa okukhulu. Ukukhethwa kwezinto zokwakha lapho usebenzisa i-DLL kukhawulelwe ngabakwa-Photoresists - I-Polymeric Photosday Materials. Ngenxa yokubonakala kwama-polymers kuhlu olubonakalayo, ukuntuleka kwezinto ezisebenza ngogesi, izakhiwo zemishini ye-mediocre, kanye nokushisa okuphansi kanye nokuqina kwemisebe, ukusetshenziswa okusebenzayo kwezakhiwo ezidalwe nge-DLL kuhlala kukhawulelwe. Kungenzeka unqobe eminye yemikhawulo ekhona usebenzisa ukucutshungulwa kwangemva kwezakhiwo ze-DF.
Enye yezindlela ezithembisayo zokusebenza ngemuva zibizwa ngokuthi i-pyrolysis, okusinikeza ngasikhathi sinye ukwanda kwesisombululo kanye nokwethulwa kokusebenza okusha. Ikakhulu, izinto zokwenziwa kwama-pyyrolycred zibonise ukuqina okuphezulu okushisayo kanye nokuqina kwemisebe kanye namandla andayo omshini. I-DLL elandelwa nge-pyrolysis isivele isetshenziselwe ngempumelelo ukuthola i-carbon nanoelectrode yokuzwakala kwe-neurotiator, amathiphu akhethekile ama-athomu-force ama-microscopy, ama-metamataria abonakalayo.
I-pyrolysis futhi ithuthukisa ukulungiswa kwendlela ye-DLL, ngoba isakhiwo esivezwe nge-pyrolysis, sikhombise ukushwabana okubalulekile uma kuqhathaniswa nosayizi wokuqala. Kepha i-shrinkage yezakhiwo ze-pyrolyzed ibangezelela inkinga yesakhiwo sokunamathela ku-substrate avest isivele esigabeni se-DLL. Lezi zinkinga zibaluleke kakhulu, kepha kuze kube manje kwakungekho ucwaningo oluphelele ngalezi zinkinga. Okwamanje, ukuhlolwa okulungile ukwehla ngosayizi wezinto futhi ngokujwayelekile ukuhlolwa okuphelele komthelela wePholyly we-pyshorthis kwisakhiwo se-DF kuyadingeka ngokuphelele uma kunomsebenzi wokuthola ukunemba okuphezulu.
Umugqa ophezulu: I-IP-DIP (a) i-lens (a) e-pyrolysis kanye (b) ngemuva kwe-pyrolysis ku-450 degrees C. Middle Range: I-Ormocomp (c) i-lens to pyrolysis kanye nangemva kwama-pyrolysis ku (d) ama-degrees C kanye (e) Ama-degree angama-690 c
Ososayensi bemikhakha yeNanofotonic of the Center of Quantum Technologies MSU bazibekele umsebenzi wokwenza isifundo sokuqhathanisa sethonya le-pyrolysis ezintweni eziningi ze-micrometers ngosayizi we-dlloreters atholakala ku-photleoresists amathathu atholakalayo -Dip ne-Organ-inorganic Ormocump kanye ne-SZ2080. Okokushisa kwamazinga okushisa ama-450 nama-690 degrees Celsius esimweni se-argen, ushintsho ngosayizi, ukwakheka kwamakhemikhali kanye nokunamathela ku-substrate yepuleti ye-silicon kwaqokwa.
Emsebenzini oshicilelwe e-Optical Material Journal, ososayensi be-CCC bakuqinisekisile ukuthi i-shrinkage yesakhiwo inqunywa ngohlobo lwe-Photoresist, kanye nokushisa kwe-pyrolysis, umkhathi kanye nesakhiwo sejometri. Ukunaka ukuziphatha kwe-photoresist ethile ngemuva kokusebenza nge-proly-progsing nge-pyrolysis, kungenzeka ukufezekisa imiphumela ephezulu, okuhambisana ngokuphelele nemisebenzi ethile, bese udala ama-micro- nokungamelana nawo angenakuqhathaniswa futhi anokwethenjelwa kanye nama-nanostructor we-shape aphikisayo futhi cishe noma iyiphi indawo oya kuyo.
Ukuqhathanisa kubonise ukuthi izinga lokushisa eliphakeme liholela ekunciphiseni okunamandla. Izakhiwo ezivela ku-IP-DIC ngemuva kokuguqulwa ziguqulwe zibe yikhabhoni yengilazi, kuyilapho izinto ezincane ze-Ormocomp kanye ne-SZ2080 Photoslessist ziguqulwa engilazini. Izakhiwo ezivela kwi-IP-DIP zibonisa futhi ukushwabana okukhulu kakhulu kuma-photoresist akhethiwe. Ngakho-ke, i-DLL ene-pyrolysis elandelayo ye-pyyrolysis ye-IP-DIP ingasetshenziswa ukudala izinhlaka ze-Carbon ze-Glan.
I-OrmoComp ilusizo ekudalweni kokufika oku-oprical kwezinto ezibonakalayo ezingafunwa kwimithombo ye-X-ray. Futhi, izakhiwo ezivela ku-Photoresist SZ2080 ngesikhathi se-pyrolysis zivame ukunqanyulwa kusuka ku-substrate, okulungele ukwenziwa kwezakhiwo ezizodwa, okudingeka zithuthelwe komunye umshado. Idatha etholakele ingaphinde isetshenziswe kusetshenziswa ubuchwepheshe be-pyrolysis njengendlela ejwayelekile yezakhiwo ezengeziwe zokucubungula ezenziwe yi-DLL Technology, futhi izosebenza njengokuthuthuka okusebenzayo kwalolu hlobo lokusebenza kwangemva kwalokho, ososayensi.
Umthombo: Isayensi Enqunu