Ob-photo laser lier lierrograph (DL) yog ib qho ntawm cov lus qhia tseem ceeb hauv kev txhim kho thev naus laus zis siv los tsim polymer micro- thiab noanjections. Nws cov tsis muaj peev xwm ntxiv yog muaj peev xwm tsim cov qauv ntawm yuav luag txhua yam muaju, WaveGuides, ntau yam xws li hauv kev ua cov khoom siv thiab chaw khaws khoom.
Txawm li cas los xij, txawm hais tias muaj cov sijhawm zoo muab los ntawm cov thev naus laus zis no, nws muaj kev txwv ntau. Kev xaiv ntawm cov ntaub ntawv thaum siv DLL tsuas yog txwv los ntawm cov photoresists - polymeric piresensitive cov ntaub ntawv. Vim tias cov pob tshab ntawm cov polymers hauv cov khoom siv hluav taws xob, nrog rau cov khoom siv hluav taws xob tsawg, cov qauv siv hluav taws xob tsis muaj nrog cov qauv tseem txwv. Nws yog ib qho ua tau kom kov yeej qee qhov kev txwv uas twb muaj lawm uas siv cov qauv tom qab ntawm DF-qauv.
Ib qho ntawm cov kev cog lus ntawm kev tshaj tawm tom qab yog hu ua pyrolysis, uas ib ib txhij muab ob qho kev nce ntxiv hauv kev daws teeb meem tshiab. Tshwj xeeb, pyrolycred cov ntaub ntawv pom tau zoo siab thermal thiab hluav taws xob ruaj khov raws nrog zog siv zog. DLL ua raws li pyrolysis twb tau tiav los tau cov pa roj carbon monoxal rau cov pa hluav taws xob, Photo cov duab tshwj xeeb hauv cov khoom siv pom thiab cov duab tshwj xeeb hauv cov khoom siv pom thiab cov khoom siv superproof.
Pyrolysis tseem txhim kho kev daws teeb meem ntawm DLL qauv, txij li cov qauv nthuav tawm rau pyrolysis, pom qhov tseem ceeb shrinkage piv rau thawj qhov loj. Tab sis shrinkage ntawm pyrolyzed qauv ua rau teeb meem ntawm cov qauv nplaum ntawm adhesion rau lub substrate arutising twb nyob hauv lub DLL theem. Cov teeb meem no yog qhov tseem ceeb ua tau tseem ceeb, tab sis tam sim no tsis muaj kev tshawb fawb txog cov teeb meem no. Lub caij no, txoj kev ntsuam xyuas kom raug ntawm qhov loj me ntawm cov kev cuam tshuam ntawm DF-qauv ntawm kev tau txais kev ntsuas MIC Mi nrog cov neeg muaj tseeb.
Sab saum toj Leej: IP-DIP (a) rau pyrolysis ntawm 450 degrees ntau yam: Ormocomp (C) 450 degrees C thiab (e) 690 degrees c. Kev Qeeb C. QUSENE: Lens SZ2080 (F) rau Pyrolysis thiab (F) Tom qab Pyrolysis ntawm 690 degrees C / © www.osapubublish.org
Cov kws tshawb fawb ntawm nanofotonic cov haujlwm ntawm QUANEATUM thev naus laus zis ntawm cov khoom siv micrometers ntawm cov khoom siv DLL ntawm cov khoom siv ntawm cov khoom siv ntawm cov khoom lag luam hauv peb cov neeg soj ntsuam cov khoom lag luam -Dip thiab EcG-inorganic Ormocomp thiab SZ2080. Rau annealing kub 450 thiab 690 degrees Celsius hauv ib qho kev sib cav, cov khoom siv tshuaj lom neeg thiab cov khoom noj tshuaj lom neeg mus rau txheej txheem silicon tau kwv yees.
Hauv kev ua haujlwm luam tawm nyob rau hauv cov khoom siv kho tshiab qhia tias cov ntawv sau ua kom pom tseeb tias cov qauv ntawm cov photoresist, ntxiv rau cov pyrolysis kub, huab cua thiab geometry qauv ntsuas kub, huab cua thiab geometry qauv ntsuas dej. Kev noj rau hauv tus account ntawm tus cwj pwm ntawm tus photoresist tom qab tshaj tawm, thiab tsim tau kom ua tiav cov haujlwm tshwj xeeb, thiab txhim kho cov kab ke kom zoo thiab muaj peev xwm txhim kho cov duab tsis meej thiab yuav luag txhua lub hom phiaj.
Kev sib piv pom tias muaj cov ua haujlwm kub siab dua rau qhov muaj zog shrinkage. Cov qauv los ntawm IP-dip tom qab annealing hloov pauv mus rau hauv iav carbon monoxide, thaum cov khoom sib xyaw ntawm Ormocomp thiab SZ20ompeists raug hloov kho hauv lub khob nrog annealing. Cov qauv los ntawm IP-dip kuj tseem ua rau pom qhov loj tshaj plaws los ntawm cov phodoresists uas tau xaiv. Yog li, DLL nrog rau cov pyrolysis tom ntej ntawm IP-dip pyrolysis tuaj yeem siv los tsim cov qauv iav carbon.
Ormocomp yog qhov muaj txiaj ntsig rau kev tsim cov xaj tau ntawm Optical cov ntsiab lus uas tuaj yeem siv tau ntawm xoo hluav taws xob. Nyob rau hauv lem, cov qauv los ntawm cov photoresist sz2080 feem ntau txiav tawm los ntawm cov txheej txheem, uas yooj yim rau kev tsim khoom ntawm ib leeg qauv, uas tom qab ntawd yuav tsum tau tsiv mus rau lwm hnub Wednesday. Cov ntaub ntawv tau yuav siv ntxiv siv cov pyrolysis ua tus qauv txheej txheem kev ua yeeb yam tsim los ntawm hom kev ua haujlwm tom ntej no, cov kws tshawb fawb.
Tau qhov twg los: Naked Science